Over 67GHz bandwidth and 1.5V InP-based optical IQ modulator with nipn heterostructure. For EOM, we adopt one-dimensional photonic-crystal nanobeam as the basic underlying structure (Fig. Correspondence to This is in strong contrast to piezoelectric acoustic modulation which is confined to the vicinity of mechanical resonance frequency45,49,50. Phys. As shown in Fig. Nevertheless, there still exists a balance between the driving voltage and modulation bandwidth. a Schematic of the LN photonic-crystal EOM. 35, 346396 (2017). Jin, S., Xu, L., Zhang, H. & Li, Y. LiNbO3 thin-film modulators using silicon nitride surface ridge waveguides. Google Scholar. fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. It was supported by the Defense Advanced Research Projects Agency under grant HR0011-20-C-0137 and the Air Force Office of Scientific Research under grant FA9550-19-1-0376. For LN, however, the EOMs developed so far1,13,14,15,16,17,18,19,20,21,22,23,24,25,26 generally exhibit significant dimensions, leading to significant power required to drive the EOMs. The detector output was recorded either by a microwave network analyzer (Keysight N5235B) for characterizing the modulation bandwidth or by a sampling oscilloscope module (Keysight 54754A) to record the eye diagram of the switching signal. Input requirements, test setups, and mounting instructions will be covered. Nat. Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. High-quality lithium niobate photonic crystal nanocavities. Science 361, 13581363 (2018). Miller, D. A. Appl. Lu, H. et al. Wang, J. et al. M.L. Optica 4, 12511258 (2017). Photonics 1, 407410 (2007). Recently, thin-film monolithic LN11,12 emerges as a promising platform, where low-loss and high-quality photonic integration together with the strong Pockels effect enables superior modulation performance13,14,15,16,17,18,19,20,21,22,23,24,25,26, showing great potential as an excellent medium for photonic integrated circuits and future photonic interconnect. Express 26, 2372823739 (2018). Wlbern, J. H. et al. PubMed Azadeh, S. S. et al. Opt. Photon. supervised the project. Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. 1a). & Thomson, D. J. Abstract: In this paper, we demonstrate up to 260-GBaud single-wavelength coherent transmission by employing an optical transmitter based on two wide-bandwidth devices: a novel 260-GS/s arbitrary waveform generator with a 10-dB bandwidth of 90-GHz and a thin-film Lithium Niobate I/Q modulator with a 3-dB bandwidth of 110-GHz. 34, 29412951 (2016). ADS Nat. Phys. In 2015 Optical Fiber Communications Conference and Exhibition 13 (2015); https://doi.org/10.1364/OFC.2015.Th4E.3. Peer review information Nature Communications thanks Huihui Lu, and the other, anonymous, reviewer(s) for their contribution to the peer review of this work. High-Q lithium niobate microdisk resonators on a chip for efficient electro-optic modulation. Nature 568, 373377 (2019). 100G/400G LN Modulator. By combining thin-film lithium niobate devices with high-power lasers using an industry-friendly process, this research represents a key step towards large-scale, low-cost, and high-performance transmitter arrays and optical networks. In this lesson the chirp induced by the LiNbO3 is analyzed based on the voltage of operation. Provided by the Springer Nature SharedIt content-sharing initiative. Phys. Ayata, M. et al. Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth. Ultra-low power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator. Open Access articles citing this article. CAS Sci. Photon. The LN photonic-crystal nanobeam has a width of w=1200nm, layer thickness of t=300nm, and a partially etched wing layer with a thickness of 150nm. Google Scholar. Zhang, M. et al. 12, 1700256 (2018). Here, we report an EO lithium niobate metasurface mediated by topological corner states. Therefore, we expect our devices to have much higher energy efficiency, as will be shown in the following sections. 42.25.p. Extended Data Fig. This Perspective discusses and compares several different approaches to the design of high-bandwidth, low-voltage electro-optic devices, such as Mach-Zehnder modulators, made using thin-film lithium niobate (TFLN) and strategies for their incorporation as part of a larger photonic integrated circuit (PIC). Wideband thin-film lithium niobate modulator with low half-wave-voltage length product. Lithium Niobate Electro-Optic Modulators. Next, the team aims to increase the lasers power and scalability for even more applications. The photonic-crystal hole structure was patterned with ZEP-520A positive resist via electron-beam lithography, which was then transferred to the LN layer with an Ar+ plasma milling process to etch down the full 300-nm depth. Open Access A. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. The device exhibits a resonance at 1554.47nm, which corresponds to the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) (Fig. Top. Opt. Xu, Q., Schmidt, B., Pradhan, S. & Lipson, M. Micrometre-scale silicon electro-optic modulator. Top. and M.L. The cavity resonance exhibits a coupling depth of 93%, corresponding to a full-swing extinction ratio of 11.5dB. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. This phenomenon is shown more clearly in Fig. Applied Physics, Optics / Photonics, Tiantsai Lin Professor of Electrical Engineering, Leah Burrows Boyd, R. W. Nonlinear Optics (Academic, Cambridge, 2003). Express 26, 15471555 (2018). b Zoom-in image of the photonic-crystal resonator and electrodes, corresponding to the dashed rectangular region in a. c Further zoom-in image showing the detailed structure of the photonic-crystal defects cavity, corresponding to the dashed rectangular region in b. M.L., U.A.J., and S.X. 8c) due to the decrease of optical mode confinement. Express 21, 3035030357 (2013). They also thank Wuxiucheng Wang, Lejie Lu, and Ming Gong for valuable discussions and help on testing. By submitting a comment you agree to abide by our Terms and Community Guidelines. Recently, heterogeneously integrated silicon and lithium niobate (Si/LN) optical modulators have demonstrated attractive overall performance in terms of optical loss, drive voltage, and modulation bandwidth. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate. 6, 6982 (2000). 3). The light reflected from the EOM was collected by the same lensed fiber, routed by a circulator, and then delivered to a photodiode for detection. Optica 5, 233236 (2018). This value primarily reaches the photon-lifetime limit of the EOM cavity (~11ps), as the electrode circuit has much broader spectral response as indicated by the flat S11 reflection spectrum shown in the inset of Fig. Optica 6, 845853 (2019). (Credit: Second Bay Studios/Harvard SEAS). By 2026, the global lithium niobate modulator market is estimated to surpass US$36.711 billion by 2026, increasing from US$6.568 billion from 2018. 3 Electrical eye diagram at 100Gbaud. VOA variable optical attenuator, MZI MachZehnder interferometer, EDFA erbium-doped fiber amplifier, BPF bandpass filter, MNA, microwave network analyzer, PRBS pseudo-random binary sequence source. Rep. 7, 46313 (2017). Appl. Yu, Z. Opt. The devices exhibit a significant tuning efficiency up to 1.98 GHz V1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m3. P.W. 26, 13321335 (2014). Electro-optically (EO) tunable metasurfaces have received considerable attention owing to their capability for dynamic light field control. 8b, increasing the thickness, tw, of the wing layer will improve the electro-optic tuning since it enhances the amplitude of the driving electric field inside the LN photonic-crystal cavity. The devices were fabricated on a 300-nm-thick x-cut single-crystalline LN thin film bonded on a 3-m silicon dioxide layer sitting on a silicon substrate (from NanoLN). Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. Opt. DOI: 10.1364/OL.426083 Abstract L V cm, and the 3 dB electro-optical bandwidth is about 55 GHz. A variety of approaches have been employed for electro-optic modulation, such as carrier plasma dispersion6,7, electro-absorption8,9, and Pockels effect1,10, the latter of which is particularly interesting since the Pockels effect offers an ultrafast and pure refractive-index modulation over an extremely broad optical spectrum while without introducing extra loss. The scale bar on the left represents the strength of normalized electrical field (Enorm) for d, f, g. The photonic-crystal cavity is oriented along the y-axis such that the dominant optical field is in parallel with the optical axis of underlying LN medium (Fig. However, negligible degradation observed between Fig. Google Scholar. Science 298, 14011403 (2002). 7, 10031013 (2019). Nature 507, 341345 (2014). & Lin, Q. High-Q 2D lithium niobate photonic crystal slab nanoresonators. 6a). 2, red box) is used primarily for impedance matching to the large metal pad for probe contact, which can be decreased to 3m for a fully on-chip operation36. Photonics 4, 518526 (2010). 35, 346396 (2017). The velocity-matched modulator has a typical insertion loss of 4 dB, drive voltage of 5 V, and electrical return loss of . 9, 525528 (2015). 1f), so as to take the advantage of the largest electro-optic component r33 of LN. A review of lithium niobate modulators for fiber-optic communications systems. Recently, there have been significant advance in high-Q LN photonic-crystal nanoresonators43,44,45,46, which led to the demonstration of intriguing phenomena and functionalities such as photorefraction quenching43, harmonic generation44, piezo-optomechanics45, and all-optical resonance tuning46. High-speed Pockels modulation and second-order nonlinearities are key components in optical systems, but CMOS-compatible platforms like silicon and silicon nitride lack these capabilities. Our scalable modulator devices could provide cost-effective, low-power and ultra-high-speed solutions for next-generation optical communication networks and microwave photonic systems. Reed, G. T., Mashanovich, G., Gardes, F. Y. The devices exhibit a significant tuning efficiency up to 1.98 GHz V -1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m 3. Optica 4, 12511258 (2017). Deep learning with coherent nanophotonic circuits. Lu, H. et al. Express 26, 220232 (2018). Express 23, 2274622752 (2015). Zhou, B., Li, E., Bo, Y. Lett. IEEE J. Sel. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages, Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators, Spectral control of nonclassical light pulses using an integrated thin-film lithium niobate modulator, Single-photon detection and cryogenic reconfigurability in lithium niobate nanophotonic circuits, Femtojoule femtosecond all-optical switching in lithium niobate nanophotonics, Extending the spectrum of fully integrated photonics to submicrometre wavelengths, Ultra-low-power second-order nonlinear optics on a chip, Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications, Femtofarad optoelectronic integration demonstrating energy-saving signal conversion and nonlinear functions, http://creativecommons.org/licenses/by/4.0/, Controlling single rare earth ion emission in an electro-optical nanocavity, Photonic van der Waals integration from 2D materials to 3D nanomembranes, Hydrothermal growth of KTiOPO4 crystal for electro-optical application, High-performance polarization management devices based on thin-film lithium niobate. C.W. IEEE 94, 952985 (2006). Nature 528, 534538 (2015). 3, 301313 (2009). The modulators have an SMA RF input, which is directly compatible with . Photonics 13, 454459 (2019). Google Scholar. The authors thank Professor Hui Wu and Professor Wayne Knox for the use of their equipment. Quantum Electron. Broadband modulation of light by using an electro-optic polymer. The electrodes are designed to have a length of 30m to ensure a full coverage of the applied electric field over the entire photonic-crystal structure. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. Silicon optical modulators. ISSN 0028-0836 (print). a Recorded transmission spectrum of the EOM cavity as a function of applied DC voltage from 0 to 4.5V, with a voltage step of 0.5V. b Recorded resonance shift as a function of applied DC voltage, where the experimental data are shown in black dots and the blue line is a linear fitting to the data. The inset shows an optical microscopic image of an EOM with the RF probe in contact. For microwave simulations, the electric-field values are obtained when a voltage of 1V is applied across the two electrodes. conceived the experiment. High-quality lithium niobate photonic crystal nanocavities. ADS volume11, Articlenumber:4123 (2020) On chip, the lasers sit in small wells or trenches etched into the lithium niobate and deliver up to 60 milliwatts of optical power in the waveguides fabricated in the same platform. Rouvalis, E. Indium phosphide based IQ-modulators for coherent pluggable optical transceivers. The sub-wavelength-scale EOM cavity enables compact optoelectronic integration to achieve not only a high electro-optic tuning efficiency up to 16.0pmV1 (corresponding to 1.98GHzV1) that is significantly beyond other LN EOM resonators13,14,15,16,18,19,23,26, but also a large modulation bandwidth up to 17.5GHz that reaches the photon-lifetime limit of the EOM cavity. Low power 50Gb/s silicon traveling wave MachZehnder modulator near 1300nm. Appl. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. Acousto-optical modulation of thin film lithium niobate waveguide devices. Light is coupled into and out of the EOM chip via one lensed fiber. Get the most important science stories of the day, free in your inbox. Figure4a shows the transmission spectrum of an EOM when the laser is scanned in the telecom band. Photon. Wood, M. G. et al. The laser wavelength is scanned at a repetition rate of ~15Hz, so we primarily monitored the time-averaged cavity transmission. The 50-m width of the electrode (Fig. 27), which is about 22fJ per bit in our EOM. Nozaki, K. et al. 1d). Thinfilm lithium niobate (TFLN) has been widely used in electrooptic modulators, acousticoptic modulators, electrooptic frequency combs and nonlinear wavelength converters owing to the. The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro-optic switching at 11 Gb s1 with a bit-switching energy as low as 22 fJ. Product Overview. To show this phenomenon, we applied a sinusoidal RF signal at a certain frequency to the EOM and monitored the transmission spectrum of the device by scanning laser back and forth across the cavity resonance. Among various device geometries, photonic-crystal nanoresonators are particularly beneficial in this regard, given their exceptional capability of controlling light confinement and lightmatter interactions on the sub-wavelength scale. Opt. For the application of high-speed electro-optic switching, our simulations show that the electrode-waveguide spacing can be decreased to 1.5m for an optical Q of ~5000 (corresponding to a modulation bandwidth of ~45GHz), which will improve the modulation efficiency to 2.38GHzV1 (simulation details in Methods). Topics: The full cross-section is shown in d. c Dispersion property of the partially etched LN photonic-crystal nanobeam, simulated by the finite element method (FEM). ADS

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